Multiscale modeling and systemic analysis of chemical vapor deposition processes
نویسندگان
چکیده
Two multiscale computational frameworks are proposed for coupling/linking the co-existing scales in chemical vapor deposition (CVD)processes: From the macro-scale of a CVD reactor (~cm or m) to the transport inside micro-features (~μm) and kinetic Monte Carlo techniques in the nano-scale (~nm). To accelerate the computations parallel processing techniques are used. Moreover, a computational framework, based on projection type methods, is proposed to enable “black box” CFD codes to perform nonlinear systemic analysis tasks.
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